Synergy of phosphorus gettering and hydrogenation in multicrystalline silicon wafers and cells

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2002, Pages 170-173

  Martinuzzi, S ^a   Perichaud I ^a   De Wolf, S ^b   Warchol, F ^a  

^a AIX MARSEILLE UNIVERSITY   (France)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; CRYSTALLINE MATERIALS; DIFFUSION; FIRING (OF MATERIALS); HYDROGENATION; METALLIZING; PHOSPHORUS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRESSURE; SILICON NITRIDE; SILICON SOLAR CELLS;

EXTERNAL GETTERING; MINORITY CARRIER DIFFUSION LENGTH; POST GETTERING DEPOSITION;

SILICON WAFERS;

EID: 0036948528     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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