Passivation of silicon by silicon nitride films

Solar Energy Materials and Solar Cells

Volumn 72, Issue 1-4, 2002, Pages 335-341

  Kunst, M ^a   Abdallah, O ^a   Wunsch F ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Inversion layer; Passivation; Silicon nitride

Indexed keywords

CHARGE CARRIERS; ELECTRIC SPACE CHARGE; PASSIVATION; PHOTOCONDUCTIVITY; SEMICONDUCTING FILMS; SILICON NITRIDE;

SILICON NITRIDE FILMS;

SILICON WAFERS;

EID: 0036533122     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(01)00181-7     Document Type: Conference Paper

References (8)