Impact of gate area on plasma charging damage: The "reverse" antenna effect

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2002, Pages 525-528

  Krishnan, Anand T ^a   Krishnan, Srikanth ^a   Nicollian, Paul ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CURRENT DENSITY; CURRENT VOLTAGE CHARACTERISTICS; PLASMA APPLICATIONS; PROBABILITY DISTRIBUTIONS;

PLASMA CHARGING DAMAGE;

ANTENNAS;

EID: 0036932239     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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8. B. P. Linder, N. W. Cheung, P2ID, 1998, p42.