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Volumn 22, Issue 2, 2002, Pages 197-200
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The interaction of ozone with polyphenylsulfide thin films studied by ellipsometry and SPR
a
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Author keywords
Ellipsometry; Ozone detection; Polyphenylsulfide; SPR
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Indexed keywords
ELLIPSOMETRY;
GLASS;
GOLD;
HYDRODYNAMICS;
INTERFEROMETRY;
OZONE;
REAL TIME SYSTEMS;
REFRACTIVE INDEX;
SILICON WAFERS;
SPIN COATING;
SURFACE PLASMON RESONANCE;
THIN FILMS;
FILM THICKNESS;
MATERIALS SCIENCE;
DETECTION METHOD;
FILM;
OZONE;
POLYMER;
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EID: 0036927234
PISSN: 09284931
EISSN: None
Source Type: Journal
DOI: 10.1016/S0928-4931(02)00180-7 Document Type: Article |
Times cited : (15)
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References (16)
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