Texture of polycrystalline MoSx thin films magnetron sputtered from a metallic target in Ar-H2S atmospheres

Materials Research Society Symposium - Proceedings

Volumn 721, Issue , 2002, Pages 131-136

  Weiß, Volkmar ^a   Mientus, Rainald ^b   Ellmer, Klaus ^a  

^a Dept Solare Energetik ^*  (Germany)

^b OUT eV   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; GRAIN GROWTH; GRAPHITE; MAGNETRON SPUTTERING; MOLYBDENUM COMPOUNDS; SYNCHROTRON RADIATION; THIN FILMS; VAN DER WAALS FORCES; X RAY DIFFRACTION ANALYSIS;

BRAGG REFLECTION;

POLYCRYSTALLINE MATERIALS;

EID: 0036902155     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-721-j5.3     Document Type: Conference Paper

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