Fundamental properties of erbium-ions-producing liquid metal alloy ion sources

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 197, Issue 3-4, 2002, Pages 282-287

  Bischoff, L ^a   Mair, G L R ^b   Aidinis, C J ^b   Ganetsos, Th ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; ERBIUM ALLOYS; LIQUID METALS; MICROELECTRONICS; POSITIVE IONS;

MELTING POINTS;

ION SOURCES;

EID: 0036896910     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01490-8     Document Type: Article

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