Damage of alumina films by medium energy hydrogen and helium ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 197, Issue 3-4, 2002, Pages 265-270

  Bailey, P ^a   Noakes, T C Q ^a   Liu, Y ^b   Alexander, M R ^b   Koroleva, E V ^b   Skeldon, P ^b   Thompson, G E ^b   Habazaki, H ^c   Shimizu, K ^d  

^a DARESBURY LABORATORY   (United Kingdom)

^b UNIVERSITY OF MANCHESTER   (United Kingdom)

^c HOKKAIDO UNIVERSITY   (Japan)

^d KEIO UNIVERSITY   (Japan)

Author keywords

Aluminium; Beam damage; Films; Helium; Hydrogen; Oxide

Indexed keywords

ALUMINA; CONDENSATION; INTERFACES (MATERIALS); IRRADIATION; SCANNING ELECTRON MICROSCOPY; SURFACE PHENOMENA; TRANSMISSION ELECTRON MICROSCOPY;

SURFACE DAMAGES;

POSITIVE IONS;

EID: 0036896465     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01486-6     Document Type: Article

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