High-speed Si-based metal-semiconductor-metal photodetectors with an additional composition-graded i-a-Si1-xGex:H layer

Solid-State Electronics

Volumn 46, Issue 12, 2002, Pages 2027-2033

  Lin, Cha Shin ^a   Yeh, Rong Hwei ^a   Liao, Chun Hao ^a   Hong, Jyh Wong ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Amorphous film; MSM photodetector; Schottky contact

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CRYSTALLINE MATERIALS; DECOMPOSITION; ELECTRODES; HYDROGENATION; INTERFACES (MATERIALS); SEMICONDUCTING SILICON; THERMAL EFFECTS;

COMPOSITION-GRADED TECHNIQUES;

PHOTODETECTORS;

EID: 0036889833     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(02)00183-1     Document Type: Article

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