Phase measurement accuracy of feedback interferometers

Optics and Lasers in Engineering

Volumn 38, Issue 6, 2002, Pages 387-404

  Barnes, T H ^a   Eiju, T ^b   Cheung, D C L ^c   Wu, C Y ^c  

^a UNIVERSITY OF AUCKLAND   (New Zealand)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c CALLAGHAN INNOVATION   (New Zealand)

Author keywords

Feedback interferometry; Micro machine; Phase measurement accuracy

Indexed keywords

ELECTRIC POTENTIAL; MICROMACHINING; PHASE MEASUREMENT;

FEEDBACK INTERFEROMETERS;

INTERFEROMETERS;

EID: 0036885091     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00178-6     Document Type: Article

References (8)

1. Heterodyne interferometer for measuring surface profiles
2. Phase measurement interferometry techniques
3. Phase locked interferometry
4. Phase locked laser diode interferometry for surface profile measurement
5. Direct, unambiguous display of phase-difference using optical feedback to a phase-only spatial light modulator
6. Unambiguous measurement of surface profile using Sagnac interferometer with phase feedback
7. Surface profile measurement by means of a polarisation Sagnac interferometer with parallel optical feedback
8. 'Best-case' noise performance of feedback interferometer, potential for micromachine applications