Femtosecond pulsed laser ablation with spatial filtering

Optics and Lasers in Engineering

Volumn 38, Issue 6, 2002, Pages 425-432

  Venkatakrishnan, K ^a   Tan, B ^a   Koh, L H K ^a   Ngoi, B K A ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Femtosecond pulsed laser; Laser ablation; Spatial filter

Indexed keywords

ACOUSTOOPTICAL DEVICES; LASER BEAMS; LASER PULSES; MICROMACHINING; OPTICAL FILTERS;

SPATIAL FILTERS;

LASER ABLATION;

EID: 0036884248     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(02)00017-9     Document Type: Article

References (6)

1. Femtosecond pulse laser ablation of metallic semiconducting ceramic and biological materials
2. Laser ablation and micromachining with ultrashort laser pulses
3. Fast 3D laser micromachining of silicon for micromechanical and microfluidic applications