The analysis of particles at low accelerating voltages (≤ 10 kV) with energy dispersive x-ray spectroscopy (EDS)

Journal of Research of the National Institute of Standards and Technology

Volumn 107, Issue 6, 2002, Pages 555-566

  Small, J A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Electron probe analysis; Low voltage analysis; Particle analysis; Scanning electron microscopy; X ray microanalysis

Indexed keywords

ELECTRIC POTENTIAL; ELECTRON BEAMS; ELECTRON GUNS; SCANNING ELECTRON MICROSCOPY; X RAY SPECTROMETERS;

ELECTRON PROBE ANALYSIS;

ENERGY DISPERSIVE SPECTROSCOPY;

EID: 0036874805     PISSN: 1044677X     EISSN: None     Source Type: Journal    
DOI: 10.6028/jres.107.047     Document Type: Conference Paper

References (13)

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