Limitations to accuracy in extracting characteristic line intensities from x-ray spectra

Journal of Research of the National Institute of Standards and Technology

Volumn 107, Issue 6, 2002, Pages 531-546

  Statham, Peter J ^a  

^a OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

Author keywords

EDX; EDXS; Energy dispersive; Least squares fitting; Microanalysis; Spectrum processing; X rays

Indexed keywords

DETECTORS; ELECTRON BEAMS; MICROANALYSIS; PROBES; STANDARDS; X RAY SPECTROMETERS;

ELECTRON BEAM VOLTAGES;

X RAYS;

EID: 0036874047     PISSN: 1044677X     EISSN: None     Source Type: Journal    
DOI: 10.6028/jres.107.045     Document Type: Conference Paper

References (27)

1. R. Castaing, Application des sondes electroniques a une methode d'analyse ponctuelle chimique et cristallographique, Thesis, University of Paris, O.N.E.R.A. Publ. No 55 (1951).
2. S. J. B. Reed, Electron Microprobe Analysis, 2nd Ed., Cambridge Univ. Press (1993) p. xvii.
3. S. J. B. Reed and N. G. Ware, Quantitative Electron Microprobe Analysis Using a Lithium Drifted Silicon Detector, X-Ray Spectrometry 2, 69-74 (1973).
4. A. C. Dunham and F. C. F. Wilkinson, Accuracy, Precision and Detection Limits of Energy-dispersive Electron-microprobe Analyses of Silicates, X-Ray Spectrom. 7 (2), 50-56 (1978).
5. D. R. Beaman and L. F. Solosky, Accuracy of Quantitative Electron Probe Microanalysis with Energy Dispersive Spectrometers, Anal. Chem. 44 (9), 1598-1610 (1972).
6. D. E. Newbury, Standardless Quantitative Electron-Excited X-ray Microanalysis by Energy-Dispersive Spectrometry: What Is Its Proper Role?, Microsc. Microanal. 4 (6), 585-597 (1999).
7. E. D. Boyes, I. R. Hartmann, F. Gooding, D. Sokola, L. Hanna, and D. L. Smith, EDX chemical microanalysis of bulk specimens in the SEM at low beam voltage and high spatial resolution, Inst. Phys. Conf. Ser. No. 119, EMAG 91 Bristol, IOP Publishing (1991) pp. 441-444.
8. P. J. Statham, A Comparative Study of Techniques for Quantitative Analysis of the X-Ray Spectra Obtained with a Si(Li) Detector, X-Ray Spectrom. 5, 16-28 (1976).
9. F. H. Schamber, A modification of the linear least-squares fitting method which provides continuum suppression, Proc. Symp. X-Ray Fluorescence Analysis of Environmental Samples, Chapel Hill, N.C. 1976, T. Dzubay, ed., Ann Arbor Science Pub., Ann Arbor, Mich. (1977) pp. 241-257.
10. P. J. Statham. Deconvolution and Background Subtraction by Least-Squares Fitting with Prefiltering of Spectra, Anal. Chem. 49, 2149-2154 (1977).
11. E. Lifshin, The use of solid state x-ray detectors for obtaining fundamental x-ray data, Proc. 9th Ann. Conf. Microbeam Analysis Society, 53A-53B (1974).
12. C. E. Fiori, R. L. Myklebust, K. F. J. Heinrich, and H. Yakowitz, Prediction of Continuum Intensity in Energy-Dispersive X-Ray Microanalysis, Anal. Chem. 48, 172-176 (1976).
13. P. J. Statham, Pile-Up Rejection: Limitations and Corrections for Residual Errors in Energy-dispersive Spectrometers, X-Ray Spectrom. 6 (2), 94-103 (1977).
14. P. J. Statham, Quantifying benefits of resolution and count rate in EDX microanalysis, in X-Ray Spectrometry in Electron Beam Instruments, D. B. Williams, J. I. Goldstein, and D. E. Newbury, eds., Plenum Press, NY (1995) pp. 101-126.
15. P. J. Statham, X-Ray Microanalysis with Si(Li) detectors, J. Microsc. 123 (1), 1-23 (1981).
16. A. J. Craven, C. P. McHardy, and W. A. P. Nicholson, The effect of incomplete charge collection on the peak shapes from Si(Li) x-ray detectors, Proc. EMAG 87, Manchester, UK 1987, Inst. Phys. Conf. Ser. No. 90 (1987) Chap. 11, pp. 345-348.
17. D. C. Joy, Modelling the Energy Dispersive X-ray Detector, in X-Ray Spectrometry in Electron Beam Instruments, D. B. Williams, J. I. Goldstein, and D. E. Newbury, eds., Plenum Press, NY (1995) pp. 53-65.
18. J. L. Campbell, L. McDonald, T. Hopman, T. Papp, Simulations of Si(Li) x-ray detector response, X-Ray Spectrom. 30, 230-241 (2001).
19. J. J. McCarthy, The Effect of Detector Dead Layers on Light Element Detection, in X-Ray Spectrometry in Electron Beam Instruments, D. B. Williams, J. I. Goldstein, and D. E. Newbury, eds., Plenum Press, NY (1995) pp. 67-81.
20. IEEE Standard Test Procedures for Semiconductor X-Ray Energy Spectrometers, ANSI/IEEE Std 759-1984 (1984).
21. D. E. Newbury, Artifacts in Energy Dispersive X-Ray Spectrometry in Electron Beam Instruments. Are Things Getting Any Better?, in X-Ray Spectrometry in Electron Beam Instruments. D. B. Williams, J. I. Goldstein, and D. E. Newbury, eds., Plenum Press, NY (1995) pp. 167-201.
22. R. B. Mott and J. J. Friel, Improved EDS Performance with Digital Pulse Processing, in X-Ray Spectrometry in Electron Beam Instruments, D. B. Williams, J. I. Goldstein, and D. E. Newbury, Plenum Press, NY (1995) pp. 127-157.
23. C. E. Fiori, R. L. Myklebust, and K. Gorlen, Sequential simplex: a procedure for resolving specral interference in energy dispersive x-ray Spectrometry, Proc. Workshop on Energy Dispersive X-Ray spectrometry, NBS, Gaithersburg, MD, USA, 1979, NBS Pub. 604 (1981) pp. 23-25.
24. T. Kitazawa, H. Shuman, and A. P. Somlyo, Quantitative electron probe analysis: problems and solutions, Ultramicroscopy 11, 251-262 (1983).
25. P. J. Statham, Pitfalls in Linear and Non-linear Profile-fitting Procedures for Resolving Severely Overlapped Peaks, X-Ray Spectrom. 7 (3), 132-137 (1978).
26. H. Nullens, P. Van Espen, and F. Adams, Linear and non-linear peak fitting in energy-dispersive x-ray fluorescence, X-Ray Spectrom. 8, 104 (1979).
27. V. Raznikov, A. F. Dodonov, and E. V. Lanin, Data acquisition and processing in high resolution mass spectrometry using ion counting, Internatl. J. Mass Spectrom. Ion Phys. 25, 295-313 (1977).