3-D mapping with ellipsometrically determined physical thickness/refractive index of spin coated sol-gel silica layer

Bulletin of Materials Science

Volumn 25, Issue 6, 2002, Pages 557-560

  Das, S ^a   Pal, P ^a   Roy, S ^a   Chakraboarty, S ^a   Biswas, P K ^a  

^a CSIR CENTRAL GLASS AND CERAMIC RESEARCH INSTITUTE   (India)

Author keywords

3D mapping; Ellipsometric studies; Physical thickness; Refractive index; Sol gel silica layer

Indexed keywords

ELLIPSOMETRY; GLASS; MAPPING; OXIDES; REFRACTIVE INDEX; SILICATES; SOL-GELS; SURFACE PROPERTIES; THICKNESS MEASUREMENT;

BOROSILICATE; PHYSICAL THICKNESS; RADIAL DISTRIBUTION; SOL-GEL SILICA LAYER; THREE DIMENSIONAL MAPPING;

SILICA;

EID: 0036868887     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02710550     Document Type: Article

References (4)

1. Biswas P K, Kundu D and Ganguli D 1989 J. Mater. Sci. Lett. 8 1436
2. Biswas P K, Sujatha-Devi P, Chakraborty P K, Chatterjee M, Kamath M P, Joshi A S and Ganguli D 1999 in Laser materials and devices (eds) A Mallik and R R Dayal (New Delhi: Allied Publishers Ltd.) p. 314
3. Knittl Z 1976 Optics of thin films (London: John Wiley & Sons)
4. Sasaki O, Nakada T and Suzuki T 1999 Opt. Engg. 38 1679