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Volumn 27, Issue 21, 2002, Pages 1899-1901
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Imagery of local defects in multilayer components by short coherence length interferometry
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Author keywords
[No Author keywords available]
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Indexed keywords
CAMERAS;
CHARGE COUPLED DEVICES;
COHERENT LIGHT;
DIELECTRIC MATERIALS;
IMAGING TECHNIQUES;
INTERFEROMETRY;
LIGHT INTERFERENCE;
LIGHT SCATTERING;
MICROSCOPES;
OPTICAL DEVICES;
POINT DEFECTS;
THIN FILMS;
LASER MIRRORS;
OPTICAL MULTILAYERS;
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EID: 0036867817
PISSN: 01469592
EISSN: None
Source Type: Journal
DOI: 10.1364/OL.27.001899 Document Type: Article |
Times cited : (14)
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References (9)
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