Electron-temperature control in 915 MHz electron cyclotron resonance plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 6, 2002, Pages 1969-1973

  Itagaki, N ^a   Kawai, Y ^a   Kawakami, S ^b   Ishii, Nobuo ^c  

^a KYUSHU UNIVERSITY   (Japan)

^b Tokyo Electron Tohoku Co Ltd   (Japan)

^c TOKYO ELECTRON LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; COMPUTER SIMULATION; ELECTRON CYCLOTRON RESONANCE; MAGNETIC FIELD EFFECTS; MICROWAVES; TEMPERATURE CONTROL;

MAGNETIC COILS;

PLASMA THEORY;

EID: 0036863287     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1513791     Document Type: Article

References (9)

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