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Volumn 151, Issue 1-4, 2002, Pages 69-78

Particle growth and particle-surface interactions during low-temperature deposition of ceramic thin films

Author keywords

Thermodynamics: nucleation; Thin films: deposition methods; Thin films: dielectric; Thin films: growth, structure, and epitaxy; Thin films: optical properties

Indexed keywords

BODY FLUIDS; CERAMIC MATERIALS; DEPOSITION; DOPING (ADDITIVES); ETCHING; FILM GROWTH; HYDROFLUORIC ACID; IONIC STRENGTH; LOW TEMPERATURE EFFECTS; NUCLEATION; OPTICAL PROPERTIES; PH EFFECTS; REACTION KINETICS; SOLUTIONS; SUBSTRATES; THERMODYNAMICS;

EID: 0036861562     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-2738(02)00584-2     Document Type: Conference Paper
Times cited : (26)

References (21)
  • 14
    • 0033323465 scopus 로고    scopus 로고
    • L.C. Klein, L.F. Francis, M.R. DeGuire, J.E. Mark (Eds.), Organic-Inorganic Hybrid Materials II, Materials Research Society, Warrendale, PA
    • Supothina S., DeGuire M.R., Heuer A.H., Niesen T.P., Bill J., Aldinger F. Klein L.C., Francis L.F., DeGuire M.R., Mark J.E. Organic-Inorganic Hybrid Materials II. MRS Proceedings. vol. 576:1999;203-208 Materials Research Society, Warrendale, PA.
    • (1999) MRS Proceedings , vol.576 , pp. 203-208
    • Supothina, S.1    DeGuire, M.R.2    Heuer, A.H.3    Niesen, T.P.4    Bill, J.5    Aldinger, F.6
  • 19
    • 0033694192 scopus 로고    scopus 로고
    • P. Li, P. Calvert, T. Kokubo, R.J. Levy, C.R. Scheid (Eds.), Mineralization in Natural and Synthetic Biominerals Materials Research Society, Warrendale, PA
    • Sampathkumaran U., Supothina S., Wang R., DeGuire M.R. Li P., Calvert P., Kokubo T., Levy R.J., Scheid C.R. Mineralization in Natural and Synthetic Biominerals. MRS Proceedings. vol. 599:2000;177-188 Materials Research Society, Warrendale, PA.
    • (2000) MRS Proceedings , vol.599 , pp. 177-188
    • Sampathkumaran, U.1    Supothina, S.2    Wang, R.3    DeGuire, M.R.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.