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Volumn 151, Issue 1-4, 2002, Pages 69-78
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Particle growth and particle-surface interactions during low-temperature deposition of ceramic thin films
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Author keywords
Thermodynamics: nucleation; Thin films: deposition methods; Thin films: dielectric; Thin films: growth, structure, and epitaxy; Thin films: optical properties
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Indexed keywords
BODY FLUIDS;
CERAMIC MATERIALS;
DEPOSITION;
DOPING (ADDITIVES);
ETCHING;
FILM GROWTH;
HYDROFLUORIC ACID;
IONIC STRENGTH;
LOW TEMPERATURE EFFECTS;
NUCLEATION;
OPTICAL PROPERTIES;
PH EFFECTS;
REACTION KINETICS;
SOLUTIONS;
SUBSTRATES;
THERMODYNAMICS;
PARTICLE GROWTH;
THIN FILMS;
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EID: 0036861562
PISSN: 01672738
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-2738(02)00584-2 Document Type: Conference Paper |
Times cited : (26)
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References (21)
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