Ion energy distribution in an ECR plasma chamber

Vacuum

Volumn 52, Issue 4, 1999, Pages 411-414

  Junfang, Chen ^a   Zhaoxing, Ren ^b  

^a SOUTH CHINA NORMAL UNIVERSITY   (China)

^b INSTITUTE OF PLASMA PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

IONS; MICROWAVES; NITROGEN; PLASMAS;

ION ENERGY DISTRIBUTION; PLASMA CHAMBER;

ELECTRON CYCLOTRON RESONANCE;

EID: 0033116013     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00323-6     Document Type: Article

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