Silicon effect on GaN surface morphology

Microelectronics Journal

Volumn 33, Issue 11, 2002, Pages 995-998

  Benzarti, Z ^a   Halidou, I ^a   Tottereau, O ^b   Boufaden, T ^a   El Jani, Belgacem ^a  

^a FACULTÉ DES SCIENCES DE MONASTIR   (Tunisia)

^b CRHEA CNRS   (France)

Author keywords

Metalorganic vapor phase epitaxy; Morphology; Reflectometry; Si doped GaN

Indexed keywords

ATOMIC FORCE MICROSCOPY; LIGHT EMITTING DIODES; METALLORGANIC VAPOR PHASE EPITAXY; PARTIAL PRESSURE; REFLECTOMETERS; SEMICONDUCTING SILICON;

LASER REFLECTOMETRY;

GALLIUM NITRIDE;

EID: 0036856599     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(02)00066-6     Document Type: Conference Paper

References (13)

1. Nakamura S., Pearton S., Fasol G. The Blue Laser Diode. 2000;Springer, Berlin.
2. Yi G.-C., Wessels B.W. Appl. Phys. Lett. 69:1996;3028.
3. Orton J.W., Foxon C.T. Semicond. Sci. Technol. 13:1998;310. and references therein.
4. Halidou I., Benzarti Z., Chine Z., Boufaden T., El Jani B. Microelectron. J. 32:2001;137.
5. Rebey A., Boufaden T., El Jani B. J. Cryst. Growth. 203:1999;12.
6. Boufaden T., Rebey A., El Jani B. J. Crsyt. Growth. 206:1999;1.
7. Boufaden T., Rebey A., Halidou I., Chine Z., Haffouz S., El Jani B. Phys. Status Solidi (a). 176:1999;411.
8. Halidou I., Boufaden T., Touhami A., Rebey A., El Jani B. Phys. Status Solidi (a). 184:2001;263.
9. Murakami H., Asaki T., Amano H., Hiramatsu K., Sawaki N., Akasaki I. J. Cryst. Growth. 115:1991;648.
10. Koide N., Kato H., Sassa M., Yamasaki S., Manabe K., Hashimoto M., Amano H., Hiramatsu K., Akasaki I. J. Cryst. Growth. 115:1991;639.
11. Liu J., Zhi D., Redwing J.M., Tischler M.A., Kuech T.F. J. Cryst. Growth. 170:1997;357.
12. Ruvimov S., Liliental-Weber Z., Suski T., Ager J.W. III, Washburn J., Krueger J., Kisielowski C., Weber E.R., Amano H., Akasaki I. Appl. Phys. Lett. 69:1996;990.
13. W. Davis, L.F. Eastman, T. Eustis, M. Murphy, W.J. Schaff, E.L. Sophir, N. Weimann, The Fourth Wide Band-gap Workshop, St Louis, March 1997.