Large deflection of thin plates in pressure sensor applications

Journal of Applied Mechanics, Transactions ASME

Volumn 69, Issue 6, 2002, Pages 785-789

  Tong, P ^a   Huang, W ^b  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; DEFLECTION (STRUCTURES); DYNAMIC LOADS; ELASTIC MODULI; PERTURBATION TECHNIQUES; POISSON RATIO; PRESSURE GAGES; SENSORS; STRESSES;

CIRCULAR PLATE; LOAD-INDUCED RADIAL STRESS RESULTANT; PRESSURE SENSOR;

PLATE METAL;

EID: 0036853861     PISSN: 00218936     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1507767     Document Type: Article

References (4)

1. Cho, S. T., Najafi, K., and Wise, K. D., 1992, "Internal Stress Compensation and Scaling in Ultra-Sensitive Silicon Pressure Sensors," IEEE Trans. Electron Devices, 99(4), pp. 836-842.
2. Sheplak, M., and Dugundji, J., 1998, "Large Deflections of Clamped Circular Plates Under Initial Tension and Transitions to Membrane Behavior," ASME J. Appl. Mech., 65, pp. 107-115.
3. Fung, Y. C. and Tong, P., 2001, Classical and Computational Solid Mechanics, World Scientific, Singapore.
4. O'Malley, R. E., 1991, Singular Perturbation Methods for Ordinary Differential Equations, Spring-Verlag, New York.