Modeling and identification of induction micromachines in microelectromechanical systems applications

Energy Conversion and Management

Volumn 43, Issue 16, 2002, Pages 2123-2133

  Lyshevski, Sergey Edward ^a  

^a INDIANA UNIVERSITY   (United States)

Author keywords

Induction micromachines; Microelectromechanical systems; Micromotors

Indexed keywords

ASPECT RATIO; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; MICROACTUATORS; MICROMACHINING; MICROSENSORS; SIGNAL INTERFERENCE; SYNCHRONOUS MOTORS;

INDUCTION MICROMACHINES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036832994     PISSN: 01968904     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0196-8904(01)00162-5     Document Type: Article

References (13)

1. Rotational and translational microelectromechanical systems synthesis, microfabrication, analysis, and optimization
2. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic molding (LIGA process)
3. Design and testing of planar magnetic micromotors fabricated by deep X-ray lithography and electroplating
4. Surface micromachined mechanisms and micro-motors
5. The optimality of canonical variate identification by example
6. State-space model identification of deterministic nonlinear systems: Nonlinear mapping technology and application of the Lyapunov theory
7. ∞ criterion
8. New results for Hammerstein system identification
9. Comparison of three classes of identification methods
10. Nonlinear identification of induction motor parameters