Rotational and translational microelectromechanical systems: MEMS synthesis, microfabrication, analysis, and optimization

The Mechatronics Handbook

Volumn , Issue , 2002, Pages 14-1-14-35

  Lyshevski, Sergey Edward ^a  

^a INDIANA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009735358     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter

References (9)

1. Lyshevski, S. E., Nano-and Micro-Electromechanical Systems: Fundamentals of Nano-and Micro-Engineering, CRC Press, Boca Raton, FL, 2000.
2. Madou, M., Fundamentals of Microfabrication, CRC Press, Boca Raton, FL, 1997.
3. Campbell, S. A., The Science and Engineering of Microelectronic Fabrication, Oxford University Press, New York, 2001.
4. Lyshevski, S. E., Electromechanical Systems, Electric Machines, and Applied Mechatronics, CRC Press, Boca Raton, FL, 1999.
5. Lyshevski, S. E. and Lyshevski, M. A., “Analysis, dynamics, and control of micro-electromechanical systems,” Proc. American Control Conference, Chicago, IL, pp. 3091-3095, 2000.
6. Mehregany, M. and Tai, Y. C., “Surface micromachined mechanisms and micro-motors,” J. Micromechanics and Microengineering, vol. 1, pp. 73-85, 1992.
7. Becker, E. W., Ehrfeld, W., Hagmann, P., Maner, A., and Mynchmeyer, D., “Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoformung, and plastic molding (LIGA process),” Microelectronic Engineering, vol. 4, pp. 35-56, 1986.
8. Guckel, H., Christenson, T. R., Skrobis, K. J., Klein, J., and Karnowsky, M., “Design and testing of planar magnetic micromotors fabricated by deep X-ray lithography and electroplating,” Technical Digest of International Conference on Solid-State Sensors and Actuators, Transducers 93, Yokohama, Japan, pp. 60-64, 1993.
9. Lyshevski, S. E., Control Systems Theory with Engineering Applications, Birkhäuser, Boston, MA, 2001.