An object-based controller for equipment communications in semiconductor manufacturing

Robotics and Computer-Integrated Manufacturing

Volumn 18, Issue 5-6, 2002, Pages 387-402

  Cheng, Fan Tien ^a   Teng, Chun Yen ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

CIM framework; Common object request broker architecture (CORBA); Object based equipment model (OBEM); Unified modeling language (UML)

Indexed keywords

COMPUTER ARCHITECTURE; LEGACY SYSTEMS; NETWORK PROTOCOLS; QUERY LANGUAGES; SEMICONDUCTOR MATERIALS;

UNIFIED MODELING LANGUAGE (UML);

COMPUTER INTEGRATED MANUFACTURING;

EID: 0036814920     PISSN: 07365845     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0736-5845(02)00028-5     Document Type: Article

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