Development of a generic equipment manager for semiconductor manufacturing

IEEE Symposium on Emerging Technologies and Factory Automation, ETFA

Volumn 1, Issue , 1999, Pages 727-732

  Yang, Haw Ching ^a   Cheng, Fan Tien ^a   Huang, David ^a  

^a DA YEH UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE REUSABILITY; INTERFACES (COMPUTER); SEMICONDUCTOR DEVICE MANUFACTURE;

GENERIC EQUIPMENT MANAGER (GEMG); MANUFACTURING EXECUTION SYSTEM (MES);

COMPUTER INTEGRATED MANUFACTURING;

EID: 0033285503     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)