Processing of highly oriented lithium tantalate films by chemical solution deposition

Journal of Materials Research

Volumn 17, Issue 10, 2002, Pages 2532-2539

  Ono, Satomi ^a   Hirano, Shin Ichi ^a  

^a NAGOYA MUNICIPAL INDUSTRIAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; ETHANOL; FILMS; ORGANIC ACIDS; REFRACTIVE INDEX; SAPPHIRE; SOLUTIONS; SPIN COATING; SUBSTRATES; SYNTHESIS (CHEMICAL); TANTALUM COMPOUNDS;

CHEMICAL SOLUTION DEPOSITION; FORMIC ACID; LITHIUM ETHOXIDE; LITHIUM TANTALATE FILMS; PRECURSOR SOLUTION; TANTALUM PENTAETHOXIDE;

LITHIUM COMPOUNDS;

EID: 0036804818     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2002.0368     Document Type: Article

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