Manufacturing effects in microfabricated gas bearings: Axially varying clearance

Journal of Tribology

Volumn 124, Issue 4, 2002, Pages 815-821

  Piekos, E S ^a   Breuer, K S ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEARINGS (MACHINE PARTS); ETCHING;

CLEARANCE VARIATION;

TRIBOLOGY;

CLEARANCE; GAS BEARING; JOURNAL BEARING; LUBRICATION;

EID: 0036797198     PISSN: 07424787     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1430672     Document Type: Article

References (13)

1. Micro-Heat engines, gas turbines, and rocket engines - The MIT microengine project
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3. Stability analysis of gas-lubricated, self-acting, plain, cylindrical, journal bearings of finite length, using Galerkin's method
4. On the load capacity and stability of rotors in self-acting gas lubricated plain cylindrical journal bearings
5. Characterization of a time multiplexed inductively coupled plasma etcher
6. Pseudospectral orbit simulation of nonideal gas-lubricated journal bearings for microfabricated turbomachines
7. Solution of the stability problem for 360 deg. self-acting, gas-lubricated bearings
8. Chebyshev and fourier spectral methods
9. The effect of geometry variations on hydrodynamic bearing performance
10. A numerical solution for the gas lubricated full journal bearing of finite length