Broadband measurement of ESD risetimes to distinguish between different discharge mechanisms

Journal of Electrostatics

Volumn 56, Issue 3, 2002, Pages 363-383

  Bönisch, Sven ^a   Pommerenke, David ^b   Kalkner, Wilfried ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b MISSOURI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (United States)

Author keywords

Arc formation; Breakdown voltage; CMD testing; ESD discharge mechanisms; ESD reproductivity; ESD risetimes; Reproducibility; Short gap; Surface process

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRODES; SCANNING ELECTRON MICROSCOPY;

BROADBAND MEASUREMENTS;

ELECTROSTATICS;

ELECTROSTATICS;

EID: 0036788249     PISSN: 03043886     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3886(02)00056-6     Document Type: Article

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