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Volumn 74, Issue 1-4, 2002, Pages 357-363

Enhanced light-absorption and photo-sensitivity in amorphous silicon germanium/amorphous silicon multilayer

Author keywords

Multilayer; PECVD; Silicon germanium

Indexed keywords

AMORPHOUS SILICON; CRYSTAL DEFECTS; LIGHT ABSORPTION; PHOTOCONDUCTIVITY; PHOTOSENSITIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SILANES;

EID: 0036778477     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(02)00095-8     Document Type: Article
Times cited : (12)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.