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Volumn 74, Issue 1-4, 2002, Pages 357-363
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Enhanced light-absorption and photo-sensitivity in amorphous silicon germanium/amorphous silicon multilayer
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Author keywords
Multilayer; PECVD; Silicon germanium
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Indexed keywords
AMORPHOUS SILICON;
CRYSTAL DEFECTS;
LIGHT ABSORPTION;
PHOTOCONDUCTIVITY;
PHOTOSENSITIVITY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SEMICONDUCTING SILICON COMPOUNDS;
SILANES;
QUANTUM SIZE EFFECTS;
MULTILAYERS;
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EID: 0036778477
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(02)00095-8 Document Type: Article |
Times cited : (12)
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References (10)
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