Thin film poly-Si solar cells using PECVD and Cat-CVD with light confinement structure by RIE

Solar Energy Materials and Solar Cells

Volumn 74, Issue 1-4, 2002, Pages 247-253

  Niira, K ^a   Senta, H ^a   Hakuma, H ^a   Komoda, M ^a   Okui, H ^a   Fukui, K ^a   Arimune, H ^a   Shirasawa, K ^a  

^a KYOCERA CORPORATION   (Japan)

Author keywords

Cat CVD; PECVD; Poly Si; RIE

Indexed keywords

CRYSTAL MICROSTRUCTURE; PARAMAGNETIC RESONANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; REACTIVE ION ETCHING; SEMICONDUCTING GLASS; THIN FILMS;

LIGHT CONFINEMENT STRUCTURES;

SILICON SOLAR CELLS;

EID: 0036778473     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(02)00080-6     Document Type: Article

References (5)