메뉴 건너뛰기




Volumn 4, Issue 5, 1996, Pages 553-564

Modeling and control of a six degree-of-freedom magnetic/fluidic motion control stage

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); DIGITAL CONTROL SYSTEMS; DIGITAL FILTERS; DIGITAL SIGNAL PROCESSING; ELECTROMAGNETS; FEEDBACK CONTROL; LINEARIZATION; MAGNETIC BEARINGS; MATHEMATICAL MODELS; MEASUREMENT ERRORS; MECHANICAL CONTROL EQUIPMENT; PARAMETER ESTIMATION;

EID: 0030244138     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/87.531921     Document Type: Article
Times cited : (20)

References (23)
  • 1
    • 36549104429 scopus 로고
    • Bimorph-driven x-y-z translation stage for scanned image microscopy
    • Apr.
    • J. R. Mately, R. S. Crandall, and B. Brycki, "Bimorph-driven x-y-z translation stage for scanned image microscopy," Rev. Sci. Instrum., vol. 58, no. 4, pp. 567-570, Apr. 1987.
    • (1987) Rev. Sci. Instrum. , vol.58 , Issue.4 , pp. 567-570
    • Mately, J.R.1    Crandall, R.S.2    Brycki, B.3
  • 2
    • 0028526039 scopus 로고
    • A new high-resolution two dimensional micropositioning device for scanning probe microscopy applications
    • Oct.
    • A. R. Smith, S. Gwo, and C. K. Shih, "A new high-resolution two dimensional micropositioning device for scanning probe microscopy applications," Rev. Sci. Instrum., vol. 65, no. 10, pp. 3216-3219, Oct. 1994.
    • (1994) Rev. Sci. Instrum. , vol.65 , Issue.10 , pp. 3216-3219
    • Smith, A.R.1    Gwo, S.2    Shih, C.K.3
  • 3
    • 0006029330 scopus 로고
    • Magnetically driven micropositioners
    • Oct.
    • D. P. E. Smith and S. A. Elrod, "Magnetically driven micropositioners," Rev. Sci. Instrum., vol. 56, no. 10, pp. 1970-1971, Oct. 1985.
    • (1985) Rev. Sci. Instrum. , vol.56 , Issue.10 , pp. 1970-1971
    • Smith, D.P.E.1    Elrod, S.A.2
  • 4
    • 0039893169 scopus 로고
    • Cryogenic scanning tunneling microscope with a magnetic coarse approach
    • Nov.
    • D. N. Davydov, R. Deltour, N. Horii, V. A. Timofeev, and A. S. Grokholski, "Cryogenic scanning tunneling microscope with a magnetic coarse approach," Rev. Sci. Instrum., vol. 64, no. 11, pp. 3153-3156, Nov. 1993.
    • (1993) Rev. Sci. Instrum. , vol.64 , Issue.11 , pp. 3153-3156
    • Davydov, D.N.1    Deltour, R.2    Horii, N.3    Timofeev, V.A.4    Grokholski, A.S.5
  • 5
    • 0006065086 scopus 로고
    • An electromagnetic microscopic positioning device for the scanning tunneling microscope
    • Dec.
    • B. W. Corb, M. Ringger, and H.-J. Guntherodt, "An electromagnetic microscopic positioning device for the scanning tunneling microscope," J. Appl. Phys., vol. 58, no. 11, pp. 3947-3953, Dec. 1985.
    • (1985) J. Appl. Phys. , vol.58 , Issue.11 , pp. 3947-3953
    • Corb, B.W.1    Ringger, M.2    Guntherodt, H.-J.3
  • 6
    • 18244421190 scopus 로고
    • Device for high resolution positioning
    • R. Carr and R. E. Thomson, "Device for high resolution positioning," Ultramicroscopy, vol. 42-44, pp. 1606-1609, 1992.
    • (1992) Ultramicroscopy , vol.42-44 , pp. 1606-1609
    • Carr, R.1    Thomson, R.E.2
  • 7
    • 0029229886 scopus 로고
    • An angstrom-positioning system using a twist-roller friction drive
    • Jan.
    • H. Mizumoto, M. Yabuya, T. Shimuzi, and Y. Kami, "An angstrom-positioning system using a twist-roller friction drive," Precision Eng., vol. 17, no. 1, pp. 57-62, Jan. 1995.
    • (1995) Precision Eng. , vol.17 , Issue.1 , pp. 57-62
    • Mizumoto, H.1    Yabuya, M.2    Shimuzi, T.3    Kami, Y.4
  • 9
    • 0040999421 scopus 로고
    • An electronic analytical balance
    • Dec.
    • J. W. Clark, "An electronic analytical balance," Rev. Sci. Instrum., vol. 18, no. 12, pp. 915-918, Dec. 1947.
    • (1947) Rev. Sci. Instrum. , vol.18 , Issue.12 , pp. 915-918
    • Clark, J.W.1
  • 10
    • 84975543336 scopus 로고
    • Ruling engine with hydraulic drive
    • Feb.
    • W. R. Horsfield, "Ruling engine with hydraulic drive," Appl. Optics, vol. 4, no. 2, pp. 189-193, Feb. 1965.
    • (1965) Appl. Optics , vol.4 , Issue.2 , pp. 189-193
    • Horsfield, W.R.1
  • 12
    • 0029222464 scopus 로고
    • Atomic-scale precision motion control stage (The Angstrom Stage)
    • M. L. Holmes, D. L. Tramper, and R. Hocken, "Atomic-scale precision motion control stage (The Angstrom Stage)," CIRP Ann., vol. 44, no. 1, pp. 455-460, 1995.
    • (1995) CIRP Ann. , vol.44 , Issue.1 , pp. 455-460
    • Holmes, M.L.1    Tramper, D.L.2    Hocken, R.3
  • 16
    • 0347270710 scopus 로고
    • Squeeze films for rectangular plates
    • June
    • D. F. Hays, "Squeeze films for rectangular plates," J. Basic Eng., Trans. ASME, pp. 243-246, June 1963.
    • (1963) J. Basic Eng., Trans. ASME , pp. 243-246
    • Hays, D.F.1
  • 18
    • 0002854251 scopus 로고
    • A kinematically coupled magnetic calibration fixture
    • Apr.
    • T. Poovey, M. L. Holmes, and D. L. Trumper, "A kinematically coupled magnetic calibration fixture," Precision Eng., vol. 16, no. 2, Apr. 1994.
    • (1994) Precision Eng. , vol.16 , Issue.2
    • Poovey, T.1    Holmes, M.L.2    Trumper, D.L.3
  • 23
    • 42149197092 scopus 로고
    • Technology transfer in the development of a nanotopographic instrument
    • J. D. Garratt and S. C. Bottomley, "Technology transfer in the development of a nanotopographic instrument," Nanotechnol., vol. 1, pp. 38-43, 1990.
    • (1990) Nanotechnol. , vol.1 , pp. 38-43
    • Garratt, J.D.1    Bottomley, S.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.