High-rate low-temperature (90 °C) deposition of Ni-Zn ferrite films highly permeable in gigahertz range

IEEE Transactions on Magnetics

Volumn 38, Issue 5 I, 2002, Pages 3156-3158

  Matsushita, Nobuhiro ^a   Chong, Chee Ping ^a   Mizutani, Tomohiro ^a   Abe, Masanori ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Ferrite plating; High deposition rate; Low temperature deposition; Ni Zn ferrite film

Indexed keywords

COERCIVE FORCE; DEPOSITION; FERRITES; LOW TEMPERATURE EFFECTS; MAGNETIC PERMEABILITY; MAGNETIC RESONANCE; MAGNETIC SHIELDING; MAGNETIZATION; OXIDATION; PH EFFECTS; SCANNING ELECTRON MICROSCOPY; SIGNAL INTERFERENCE;

HIGH DEPOSITION RATES;

MAGNETIC FILMS;

EID: 0036762602     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2002.802429     Document Type: Article

References (5)

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3. 4 films prepared by ferrite plating at 90°C," in Proc. 8th Int. Conf. Ferrites, 2001, p. 503.
4. M. Yamaguchi, S. Yabukami, and K.I. Arai, "A new permeance meter based on both lumped elements/transmission line theories," IEEE Trans. Magn., vol. 32, pp. 4941-4943, Sept. 1996.
5. S. Saito, S.H. Kong, and S. Nakagwa, "High rate deposition of Mn-Zn spinel ferrite thin films using reactive facing target sputtering," in Dig. INTERMAG 2002, paper DQ-11.