High rate deposition of Mn-Zn spinel ferrite thin films using reactive facing targets sputtering

Digests of the Intermag Conference

Volumn , Issue , 2002, Pages

  Saito, Shun ^a   Kong, S H ^a   Nakagawa, Shigeki ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; FILM GROWTH; MAGNETIC RECORDING; MAGNETIZATION; MANGANESE ALLOYS; OXIDATION; PARTIAL PRESSURE; PRODUCTIVITY; RADIATION DAMAGE; SPUTTER DEPOSITION; THERMAL EFFECTS;

FACING TARGETS SPUTTERING (FTS);

MAGNETIC THIN FILMS;

EID: 0036908052     PISSN: 00746843     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)