Fundamentals and applications of spectroscopic ellipsometry

Quimica Nova

Volumn 25, Issue 5, 2002, Pages 794-800

  Gonçalves, Débora ^a   Irene, Eugene A ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Ellipsometry; Films; Polarization

Indexed keywords

POLYMER; SILICON; SILICON DIOXIDE;

ACCURACY; ANALYTIC METHOD; CHEMICAL MODEL; ELLIPSOMETRY; OPTICS; REVIEW; SPECTROSCOPY; SURFACE PROPERTY; THICKNESS;

EID: 0036749847     PISSN: 01004042     EISSN: None     Source Type: Journal    
DOI: 10.1590/S0100-40422002000500015     Document Type: Review

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