Recommended practices for measuring and reporting outgassing data

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 5, 2002, Pages 1667-1675

  Redhead, P A ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION; IONIZATION; PHOTONS; SURFACE PROPERTIES; TEMPERATURE MEASUREMENT; UNITS OF MEASUREMENT; VACUUM APPLICATIONS;

OUTGASSING RATE;

DEGASSING;

EID: 0036747752     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1496783     Document Type: Article

References (10)

1. J. Vac. Sci. Technol. 2, 314 (1965).
2. P.A. Redhead, J. Vac. Sci. Technol. A 14, 2599 (1996).
3. R.J. Elsey, Vacuum 25, 347 (1975).
4. R.P. Henry, Le Vide 15, 226 (1959).
5. M. Minato and Y. Itoh, J. Vac. Soc. Jpn. 36, 175 (1993).
6. R.J. Elsey, Vacuum 25, 350 (1975).
7. K. Saito, Y. Sato, S. Inayoshi, and S. Tsukahara, Vacuum 47, 749 (1996).
8. R.J. Elsey, Vacuum 25, 351 (1975).
9. J.R.J. Bennet and R.J. Elsey, Vacuum 44 647 (1993).
10. R.J. Elsey, Vacuum 25, 353 (1975).