Gas flow characteristics in straight silicon microchannels

Chinese Physics

Volumn 11, Issue 9, 2002, Pages 869-875

  Ding, Ying Tao ^a   Yao, Zhao Hui ^a   Shen, Meng Yu ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Compressibility; Friction coefficient; Gas flow; Rectangular model

Indexed keywords

EID: 0036736667     PISSN: 10091963     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-1963/11/9/303     Document Type: Article

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