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Volumn 47, Issue 6, 2002, Pages 429-432
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Comment on: "Effects of the substrate on the determination of thin films mechanical properties by nanoindentation" by Saha and Nix [Acta Mater 2002;50:23]
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Author keywords
Hardness testing; Nanoindentation; Theory and modeling; Thin films
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Indexed keywords
ELASTIC MODULI;
EXTRAPOLATION;
HARDNESS TESTING;
INDENTATION;
INTERFACES (MATERIALS);
PARAMETER ESTIMATION;
SUBSTRATES;
THICKNESS MEASUREMENT;
NANOINDENTATIONS;
THIN FILMS;
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EID: 0036722821
PISSN: 13596462
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-6462(02)00171-9 Document Type: Article |
Times cited : (13)
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References (3)
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