Ohmic contacts on diamond by B ion implantation and Ta-Au metallization

Diamond and Related Materials

Volumn 11, Issue 9, 2002, Pages 1709-1712

  Zhen, C M ^a   Wang, Y Y ^a   Guo, Q F ^a   Zhao, M ^a   He, Z W ^a   Guo, Y P ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

Diamond films; Interface Interfacial; Ohmic contact; Pretreated substrates

Indexed keywords

GOLD; ION IMPLANTATION; METALLIZING; OHMIC CONTACTS; OXYGEN; TANTALUM;

PRE-TREATMENT;

DIAMONDS;

ION IMPLANTATION;

EID: 0036721318     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00144-9     Document Type: Article

References (13)