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Volumn 322, Issue 1-2, 2002, Pages 146-153
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Porous Si formation and study of its structural and vibrational properties
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Author keywords
Etching; Porous Si; Raman scattering
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Indexed keywords
ANODIC OXIDATION;
CRYSTAL STRUCTURE;
CURRENT DENSITY;
ELECTROLYTIC POLISHING;
ELECTRON DIFFRACTION;
LATTICE VIBRATIONS;
RAMAN SPECTROSCOPY;
TRANSMISSION ELECTRON MICROSCOPY;
TRANSMISSION ELECTRON DIFFRACTION (TED);
POROUS SILICON;
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EID: 0036720759
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(02)01175-4 Document Type: Article |
Times cited : (11)
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References (28)
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