Preparation of ZrO2 nano-films by an alternate reaction using ZrCl4 and O2 under atmospheric pressure

Electrochemical and Solid-State Letters

Volumn 5, Issue 9, 2002, Pages

  Yoshii, Naoki ^a   Takahashi, Naoyuki ^a   Nakamura, Takato ^a   Yoshioka, Masayuki ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b Shizuoka Industrial Research Institute of Shizuoka Prefecture   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CHEMICAL REACTIONS; CHLORINE COMPOUNDS; DEPOSITION; FILM PREPARATION; GLASS; GRAIN SIZE AND SHAPE; OXYGEN; POLYCRYSTALLINE MATERIALS; PRESSURE; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ALTERNATE REACTION; ATOMIC LAYER DEPOSITION; CRYSTALLITES; GLASS SUBSTRATES; SELF LIMITING ADSORPTION REACTION; ZIRCONIA NANO FILMS;

ZIRCONIA;

EID: 0036714109     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1498016     Document Type: Article

References (4)