SCOPUS 정보 검색 플랫폼

Journal of the Acoustical Society of America

Volumn 112, Issue 3 I, 2002, Pages 925-935

Theory of elastic wave propagation in anisotropic film on anisotropic substrate: TiN film on single-crystal Si

(1) Tewary, V K a

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ALGORITHMS; ANISOTROPY; DISPERSION (WAVES); GREEN'S FUNCTION; SILICON; SINGLE CRYSTALS; SUBSTRATES; SURFACE WAVES; THIN FILMS; TITANIUM NITRIDE;

ANISOTROPIC FILMS;

ACOUSTIC WAVE PROPAGATION;

SILICON; TITANIUM DERIVATIVE;

ACOUSTICS;

ACOUSTICS; ANISOTROPY; ARTICLE; CRYSTAL; ELASTICITY; FILM; MATHEMATICAL ANALYSIS; PRIORITY JOURNAL; SOUND TRANSMISSION; THEORY;

EID: 0036712912 PISSN: 00014966 EISSN: None Source Type: Journal
DOI: 10.1121/1.1499131 Document Type: Article

Times cited : (13)

References (39)

1
- 0029795389
- The Green's function for surface acoustic waves: Comparison between theory and experiment
- (1996) J. Acoust. Soc. Am. , vol.100 , pp. 1538-1541
- Mourad, A.¹ Desmet, C.² Lauriks, W.³ Coufal, H.⁴ Thoen, J.⁵

2
- 0041169113
- Computationally efficient representation for elastodynamic and elastostatic Green's functions for anisotropic solids
- (1995) Phys. Rev. B , vol.51 , pp. 15695-15702
- Tewary, V.K.¹

3
- 0027696105
- A new method to obtain 3-D Green's functions for anisotropic solids
- (1993) Wave Motion , vol.18 , pp. 273-289
- Wang, C.Y.¹ Achenbach, J.D.²

4
- 0028287767
- Time domain dynamic response functions of elastically anisotropic solids
- (1994) J. Acoust. Soc. Am. , vol.95 , pp. 2505-2516
- Every, A.G.¹ Kim, K.Y.²

5
- 0004084949
- Oxford University Press, Oxford
- (1996) Anisotropic Elasticity: Theory and Applications
- Ting, T.C.T.¹

6
- 0030059457
- Surface waves in three-dimensional half-space tetragonal solids
- (1996) J. Acoust. Soc. Am. , vol.100 , pp. 86-88
- Tewary, V.K.¹ Fortunko, C.M.²

7
- 0029974049
- Green's function for anisotropic half-space solids in frequency space and calculation of mechanical impedance
- (1996) J. Acoust. Soc. Am. , vol.100 , pp. 2960-2963
- Tewary, V.K.¹ Mahapatra, M.² Fortunko, C.M.³

8
- 0001469971
- Free surface (Rayleigh) waves in anisotropic elastic half-spaces: The surface impedance methods
- (1985) Proc. R. Soc. London, Ser. A , vol.402 , pp. 135-152
- Barnett, D.M.¹ Lothe, J.²

9
- 0003562619
- Krieger, Malabar, F
- (1990) Acoustic Fields and Waves in Solids , vol.1
- Auld, B.A.¹

10
- 0003551539
- Elsevier, Amsterdam
- (1995) Wave Propagation in Layered Anisotropic Media with Applications to Composites
- Nayfeh, A.H.¹

11
- 0025316427
- Influence of anisotropy on the dispersion characteristics of guided plate modes
- (1990) J. Acoust. Soc. Am. , vol.87 , pp. 1911-1931
- Li, Y.¹ Thomson, R.B.²

12
- 0001782761
- Elastic waves in free anisotropic plates
- (1973) J. Acoust. Soc. Am. , vol.54 , pp. 50-64
- Solie, L.P.¹ Auld, B.A.²

13
- 0028811810
- Lamb's problem for an anisotropic half-space studied by the Cagniard de Hoop method
- (1995) J. Acoust. Soc. Am. , vol.97 , pp. 3194-3197
- Mourad, A.¹ Deschamps, M.²

14
- 0031239210
- The elastodynamic response of a semi-infinite anisotropic solid to sudden surface loading
- (1997) J. Acoust. Soc. Am. , vol.102 , pp. 1346-1355
- Every, A.G.¹ Kim, K.Y.² Maznev, A.A.³

15
- 0024070462
- A new technique for ultrasonic-nondestructive evaluation of thin specimens
- (1988) Exp. Mech. , vol.28 , pp. 288-297
- Kinra, V.K.¹ Dayal, V.²

16
- 0031145111
- Guided waves in plates and their use in materials characterization
- (1997) Appl. Mech. Rev. , vol.50 , pp. 247-284
- Chimenti, D.E.¹

17
- 0001810578
- Considerations of the existence of interfacial (Stoneley) waves in bonded anisotropic elastic half-spaces
- (1985) Proc. R. Soc. London, Set. A , vol.402 , pp. 153-166
- Barnett, D.M.¹ Lothe, J.² Gavazza, S.D.³ Musgrave, M.J.P.⁴

18
- 0028499351
- Propagation of surface waves across an anisotropic layer
- (1994) ASME Trans. J. Appl. Mech. , vol.61 , pp. 596-604
- Its, E.N.¹ Lee, J.S.²

19
- 0032620855
- Ultrasonic waves in multilayered superconducting plates
- (1999) J. Appl. Phys. , vol.86 , pp. 543-551
- Pan, E.¹ Datta, S.K.²

20
- 0029253140
- On the accuracy of approximate plate theories for wave fields calculations in composite plates
- (1995) Wave Motion , vol.21 , pp. 17-34
- Lih, S.S.¹ Mal, A.K.²

21
- 0033822878
- On approximate guided waves in plates with thin anisotropic coatings by means of effective boundary conditions
- (2000) J. Acoust: Soc. Am. , vol.108 , pp. 924-933
- Niklasson, A.J.¹ Datta, S.K.² Dunn, M.L.³

22
- 84970134245
- Elastic Wave Propagation in Thin Layers, edited by W. P. Mason and R. N. Thurston (Academic, New York, 1972)
- (1972) Phys. Acoust. , vol.9 , pp. 35-127
- Farnell, G.W.¹ Adler, E.L.²

23
- 0030172729
- Determination of elastic constants of anisotropic solids from elastodynamic Green's functions
- (1996) Ultrasonics , vol.34 , pp. 471-472
- Every, A.G.¹ Kim, K.Y.²

24
- 0005369317
- Determination of the elastic constants of anisotropic solids from group velocities measured in symmetry directions
- (1996) Int. J. Mod. Phys. B , vol.10 , pp. 235-246
- Kim, K.Y.¹ Every, A.G.² Sachse, W.³

25
- 0033296254
- Elastic properties of GaAs obtained by inversion of laser-generated surface acoustic wave measurements
- (1999) IEEE Ultrasonics Symposium , pp. 501-504
- Flannery, C.M.¹ Chilla, E.² Semenov, S.³ Fröhlich, H.-J.⁴

26
- 0000488018
- Determination of elastic constants of thin films from phase velocity dispersion of different surface acoustic wave modes
- (1995) J. Appl. Phys. , vol.78 , pp. 5028-5034
- Makarov, S.¹ Chilla, E.² Fröhlich, H.-J.³

27
- 0029378012
- Nondestructive evaluation of the mechanical behavior of TiN-coated steels by laser-induced ultrasonic surface waves
- (1995) Appl. Phys. A: Mater. Sci. Process. , vol.61 , pp. 277-284
- Schneider, D.¹ Ollendorf, O.² Schwarz, T.³

28
- 0031074321
- Non-destructive evaluation of diamond and diamond like carbon films by laser induced surface acoustic waves
- (1997) Thin Solid Films , vol.295 , pp. 107-116
- Schneider, D.¹ Schwarz, T.² Scheibe, H.-J.³ Panzner, M.⁴

29
- 0026929747
- Determination of elastic modulus and thickness of surface layers by ultrasonic surface waves
- (1992) Thin Solid Films , vol.219 , pp. 92-102
- Schneider, D.¹ Schwarz, T.² Schultrich, B.³

30
- 0001486197
- Laser generation and detection of surface acoustic waves: Elastic properties of surface layers
- (1992) J. Appl. Phys. , vol.71 , pp. 227-238
- Neubrand, A.¹ Hess, P.²

31
- 0032730552
- Inverse determination of thickness and elastic properties of a bonding layer using laser-generated surface waves
- (1999) Ultrasonics , vol.37 , pp. 23-30
- Wu, T.T.¹ Liu, Y.H.²

32
- 0001745317
- Laser-ultrasonic methods for thin-film property measurements using high-frequency surface acoustic waves
- Review of Progress in Quantitative Nondestructive Evaluation, edited by D. O. Thompson and D. E. Chimenti (AIP, Melville, NY, 2001)
- (2001) AIP Conf. Proc. , vol.20 , pp. 263-270
- Hurley, D.C.¹ Richards, A.J.²

33
- 0024302716
- Elastic Green's function for a composite solid with a planar interface
- (1989) J. Mater. Res. , vol.4 , pp. 113-123
- Tewary, V.K.¹ Wagoner, R.H.² Hirth, J.P.³

34
- 0028076386
- (1994) Surf. Coat. Technol. , vol.70 , pp. 97-106
- Bendavid, A.¹ Martin, P.J.² Netterfield, R.P.³ Kinder, T.J.⁴

35
- 0003531591
- Krieger, Malabar, FL
- (1992) Theory of Dislocations, 2nd ed.
- Hirth, J.P.¹ Lothe, J.²

36
- 0024128094
- (1988) Surf. Coat. Technol. , vol.36 , pp. 647-659
- Fillit, R.Y.¹ Perry, A.J.²

37
- 0029487115
- (1995) Thin Solid Films , vol.271 , pp. 108-116
- Meng, W.J.¹ Eesley, G.L.²

38
- 0026883413
- (1992) Thin Solid Films , vol.214 , pp. 25-34
- Kim, J.O.¹ Achenbach, J.D.²

39
- 0032620511
- (1999) J. Appl. Phys. , vol.86 , pp. 311-317
- Pang, W.¹ Every, A.G.² Comins, J.D.³ Stoddart, P.R.⁴ Zhang, X.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.