PN-based scheduler for a flexible semiconductor manufacturing system

IEEE Symposium on Emerging Technologies & Factory Automation, ETFA

Volumn 2, Issue , 1996, Pages 724-729

  Cavalieri, S ^a   Mirabella, O ^a  

^a UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

FLEXIBLE MANUFACTURING SYSTEMS; MATHEMATICAL MODELS; PETRI NETS; PROBLEM SOLVING; SCHEDULING;

FLEXIBLE SEMICONDUCTOR MANUFACTURING SYSTEM; OFFLINE SCHEDULING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030393846     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)