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Volumn 51, Issue 4, 2002, Pages 819-823
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Displacement sensor based on pyroelectric thick films and contactless light-spot cursor
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Author keywords
Displacement measurement; Pyroelectric sensor; Thick film sensor
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Indexed keywords
ALUMINA;
LEAD COMPOUNDS;
LIGHT EMITTING DIODES;
PYROELECTRICITY;
READOUT SYSTEMS;
SPATIAL VARIABLES MEASUREMENT;
SUBSTRATES;
THICK FILMS;
DISPLACEMENT MEASUREMENT;
LEAD ZIRCONATE TITANATE;
PYROELECTRIC SENSOR;
PYROELECTRIC THICK FILMS;
THICK FILM SENSOR;
SENSORS;
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EID: 0036703623
PISSN: 00189456
EISSN: None
Source Type: Journal
DOI: 10.1109/TIM.2002.803395 Document Type: Article |
Times cited : (12)
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References (9)
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