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Volumn 34, Issue 1, 2002, Pages 686-689
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Rapid chemical and structural characterization of metastable thin-film libraries by a combination of electron probe microanalysis and scanning x-ray diffraction
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Author keywords
Combinatorial chemistry; Electron probe microanalysis; EPMA; Hard coatings; X ray diffraction; XRD
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Indexed keywords
ADDITION REACTIONS;
ALUMINUM NITRIDE;
CHARACTERIZATION;
CRYSTAL STRUCTURE;
DEPOSITION;
GRAIN SIZE AND SHAPE;
MAGNETRON SPUTTERING;
MICROANALYSIS;
SILICON NITRIDE;
TEXTURES;
TITANIUM NITRIDE;
X RAY DIFFRACTION ANALYSIS;
APERTURES;
CATHODE MAGNETRON SPUTTERING;
COMBINATORIAL CHEMISTRY;
CRYSTALLOGRAPHIC STRUCTURE;
ELECTRON PROBE MICROANALYSIS;
HARD COATINGS;
SCANNING X-RAY DIFFRACTION;
THIN FILM LIBRARIES;
THIN FILMS;
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EID: 0036694149
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1388 Document Type: Conference Paper |
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Times cited : (5)
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References (8)
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