SCOPUS 정보 검색 플랫폼

Surface and Interface Analysis

Volumn 34, Issue 1, 2002, Pages 740-743

Surface chemical changes induced by low-energy ion bombardment in chromium nitride layers

(4) Bertoti I a Mohai, M a Mayrhofer, P H b Mitterer, C b

a CHEMICAL RESEARCH CENTER (Hungary)

b Institut fur Metallkunde und Werkstoffprufung (Austria)

Author keywords

Chromium nitride; Reactive sputtering; Superstoichiometry; XPS

Indexed keywords

ATOMS; BINDING ENERGY; CHEMICAL MODIFICATION; COMPOSITION; COMPOSITION EFFECTS; INORGANIC COATINGS; ION BOMBARDMENT; ION IMPLANTATION; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; SURFACE STRUCTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC CONCENTRATION; CHEMICAL STATES; CHROMIUM NITRIDE; LOW ENERGY ION BOMBARDMENT; REACTIVE MAGNETRON SPUTTERING;

CHROMIUM COMPOUNDS;

EID: 0036693089 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.1401 Document Type: Conference Paper

Times cited : (25)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.