Low-temperature fabrication of high-quality (Ba, Sr)TiO3 films using charged liquid cluster beam method

Journal of Materials Research

Volumn 17, Issue 8, 2002, Pages 1888-1891

  Choi, Hyungsoo ^a   Park, Sungho ^a   Yang, Yi ^a,c   Kang, Ho Chu ^a   Kim, Kyekyoon Kevin ^a   Sung, M Y ^b   Jang, Ho G ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b Korea University   (South Korea)

^c KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CURRENT DENSITY; DEPOSITION; LEAKAGE CURRENTS; LOW TEMPERATURE EFFECTS; PERMITTIVITY; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; THIN FILMS;

ALKOXY CARBOXYLATE LIGANDS; CHARGED LIQUID CLUSTER BEAM METHOD; HIGH QUALITY FILMS; LOW TEMPERATURE FABRICATION; PURITY;

BARIUM COMPOUNDS;

EID: 0036671362     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2002.0279     Document Type: Article

References (11)