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Volumn 4, Issue 8, 2002, Pages 554-557
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X-ray diffraction study of thin film elastic properties
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Author keywords
[No Author keywords available]
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Indexed keywords
ANISOTROPY;
ATOMIC FORCE MICROSCOPY;
CRYSTAL MICROSTRUCTURE;
ELASTIC MODULI;
ELASTICITY;
MULTILAYERS;
NANOSTRUCTURED MATERIALS;
POISSON RATIO;
RESIDUAL STRESSES;
SPUTTER DEPOSITION;
STRESS ANALYSIS;
SUBSTRATES;
TENSILE TESTING;
X RAY DIFFRACTION ANALYSIS;
HIGH-ANGLE SYMMETRIC X-RAY DIFFRACTION (SXRD);
THIN FILMS;
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EID: 0036669918
PISSN: 14381656
EISSN: None
Source Type: Journal
DOI: 10.1002/1527-2648(20020806)4:8<554::AID-ADEM554>3.0.CO;2-A Document Type: Conference Paper |
Times cited : (1)
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References (8)
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