Real-time measurement of nanometer displacement distribution by integrated phase-shifting method

JSME International Journal, Series A: Solid Mechanics and Material Engineering

Volumn 45, Issue 3, 2002, Pages 448-452

  Motoharu, Fujigaki ^a   Yoshiharu, Morimoto ^a   Masato, Yabe ^a  

^a WAKAYAMA UNIVERSITY   (Japan)

Author keywords

Image processing; Integrated phase shifting method; Micro accelerometer; Nanometer displacement distribution; Nondestructive inspection; Optical measurement; Real time

Indexed keywords

INTEGRATED PHASE-SHIFTING METHOD (IPSM);

CAMERAS; IMAGE PROCESSING; INTERFEROMETRY; MICROMACHINING; NANOTECHNOLOGY;

PHASE SHIFTERS;

DISPLACEMENT; MEASUREMENT METHOD; NON-DESTRUCTIVE TESTING; OPTICAL TECHNIQUE; PHASE SHIFT; REAL TIME METHOD;

EID: 0036658707     PISSN: 13447912     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmea.45.448     Document Type: Article

References (13)

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