Real-time shape measurement by integrated phase-shifting method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3744, Issue , 1999, Pages 118-125

  Morimoto, Yoshiharu ^a   Fujigaki, Motoharu ^a   Toda, Hiroki ^a  

^a WAKAYAMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; DIFFRACTION GRATINGS; FUNCTIONS; PHASE SHIFT; SPATIAL VARIABLES MEASUREMENT;

INTEGRATED PHASE SHIFTING METHOD; SHAPE MEASUREMENT;

INTERFEROMETRY;

EID: 0032672806     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)