Modeling and fabrication of hollow optical waveguide for photonic integrated circuits

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 7 B, 2002, Pages 4785-4789

  Miura, Toru ^a   Koyama, Fumio ^a   Matsutani, Akihiro ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Dry etching; Effective refractive index; Hollow optical waveguide; Multilayer reflector; Passive optical devices; Photonic integrated circuits

Indexed keywords

ETCHING; LIGHT POLARIZATION; LIGHT REFLECTION; OPTICAL FILTERS; OPTICAL WAVEGUIDES; REFRACTIVE INDEX;

PHOTONIC INTEGRATED CIRCUITS;

INTEGRATED CIRCUITS;

EID: 0036657433     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4785     Document Type: Conference Paper

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