(001)-textured Cu2S thin films deposited by RF reactive sputtering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 7 A, 2002, Pages 4630-4634

  He, Yunbin ^a   Kriegseis, Wilhelm ^a   Bläsing, Jùrgen ^b   Polity, Angelika ^a   Krämer, Thorsten ^a   Hasselkamp, Dietmar ^b   Meyer, Bruno K ^a   Hardt, Martin ^a   Krost, Alois ^a  

^a JUSTUS LIEBIG UNIVERSITY   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Cu2S; GIXRD; RF reactive sputtering; Texture structure; Thin films

Indexed keywords

COMPOSITION; GLASS; MORPHOLOGY; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; SURFACE PROPERTIES; SURFACE ROUGHNESS; TEXTURES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

GRAZING INCIDENCE GEOMETRY; HEXAGONAL STRUCTURE; RADIO FREQUENCY REACTIVE SPUTTERING; SURFACE DENSITY; THICKNESS; X RAY REFLECTIVITY;

COPPER COMPOUNDS;

EID: 0036656136     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4630     Document Type: Article

References (24)