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Materials Science and Technology

Volumn 18, Issue 7, 2002, Pages 717-720

Lithographic tools for producing patterned films composed of gas phase generated nanocrystals

(6) Otten, F a Auer, U a Kruis, F E a Prost, W a Tegude, F J a Fissan, H a

a UNIVERSITY OF DUISBURG ESSEN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONFERENCE PAPER; CRYSTALLIZATION; ELECTRICITY; FILM; GAS; MODEL; NANOPARTICLE;

EID: 0036650836 PISSN: 02670836 EISSN: None Source Type: Journal
DOI: 10.1179/026708302225003794 Document Type: Conference Paper

Times cited : (16)

References (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.